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Brooks Puromaxx Environmental Equipment & Supplies
2 equipment items found
Manufactured by:Brooks Automation based inChelmsford, MASSACHUSETTS (USA)
The PuroMaxx 800 fully automatic 300mm FOUP cleaner combines the best particle and AMC cleaning performance and provides humidity control at the highest throughput. Vacuum decontamination chambers are integrated to the footprint and loaded by the robot. Provides maximum performance by individually cleaning each EUV or RSP 200 ...
Manufactured by:Brooks Automation based inChelmsford, MASSACHUSETTS (USA)
The PuroMaxx 600 fully automatic central force cleaner is the perfect solution for the automatic cleaning of RSP150 or RSP200. In manual mode, all types of reticle or wafer carriers can be cleaned. The PuroMaxx 600 is the perfect solution for the automatic cleaning of RSP150 or ...